Ultra high purity gas sticks for semiconductor, LED, photovoltaic, and MEMS equipment hookup. Ultra high purity filtration in valve manifold boxes, gas cabinets, tool isolation gas boxes, on-board gas delivery boxes or any process requiring ultra high purity particle removal.
GasShield® Defender is a line of ultra high purity gas filters that incorporates exclusive all fiber metal media. Defender meets the demands of ultra high purity gas delivery applications with a 9 LRV (log reduction value) of particles down to 0.0015 µm.
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